It is the system for inventory management, volume controlling, and carrying- in/carrying-out/storage of Foup in the Semiconductor FAB processing.
Foup Stocker for semiconductor
- Transported material : 300mm Wafer Foup
- Degree of alignment precision : 1mm
- Load weight : 10kg
- Crane Driving Speed : 1.5m/s (User Order)
- Lift Speed : 1m/s (User Order)
- Main use : 300mm Semiconductor production line (Class 100)