We aresupplying stocker, OHS/OHT, rail system and AGV which are the automation equipment for 200mm Cassette and 300mm Foup. We have developed on our own and are using the software flexibly controlling the volume management of the whole system, and are accumulating the reliability of the products through simulation of the transferred objects volume, simulation of air flow in the stocker.
Stocker
It is the system for inventory management, volume controlling, and carrying- in/carrying-out/storage of Foup in the Semiconductor FAB processing.
Foup Stocker for semiconductor
- Transported material : 300mm Wafer Foup
- Degree of alignment precision : 1mm
- Load weight : 10kg
- Crane Driving Speed : 1.5m/s (User Order)
- Lift Speed : 1m/s (User Order)
- Main use : 300mm Semiconductor production line (Class 100)
