AGV is the unmanned electric vehicle automatically transferring and loading the freight in various ways. The feature of ZENIX AGV is the self-development of main systems. ZENIX has developed and is applying the AGV control system and the software of volume management system, and has developed and is applying the driving and steering motor control board optimized for AGV. We continually proceed with localization/self-development of main components and software, not depending on the foreign goods.
Clean AGV
Used for automatic loading/unloading of the transferred objects on the production line of semiconductor, LCD, OLED and pharmaceutical vial
Transferred objects : 200mm CST, 300mm Foup, CF/TFT MASK & Case, CF/TFT Glass Crate, Glass, Vial
LCD/OLED Bare Mask AGV
- Loading/Unloading : articulated robot
- Degree of alignment precision : 1mm
- Load weight : 200kg (User Order)
- Speed : 1m/s (User Order)
- Transported material : LCD/OLED MASK Cassette
- Main use : LCD/OLED production line (Class 1)
LCD/OLED Cassette AGV
- Loading/Unloading : Clean Conveyor
- Degree of alignment precision : ±10mm
- Load weight : 100kg (User Order)
- Speed : 1m/s (User Order)
- Transported material : LCD/OLED Glass Cassette
- Main use : LCD/OLED production line (Class 100)
LCD/OLED CF Mask AGV
- Loading/Unloading : multi-stage sliding robot
- Degree of alignment precision : 1mm
- Load weight : 180kg (User Order)
- Speed : 0.8m/s (User Order)
- Transported material : LCD CF Mask case and automatic transported material in the clean room
- Main use : LCD/OLED Mask Line
LCD/OLED Crate AGV
- Loading/Unloading : Clean Conveyor
- Degree of alignment precision : ±10mm
- Load weight : 3,000kg (User Order)
- Speed : 1.3m/s (User Order)
- Transported material : Crate glass and pallet in the clean room
- Main use : LCD/OLED glass manufacturing factory, LCD/OLED production line
LCD/OLED TFT Mask AGV
- Loading/Unloading : Vision Align Stage
- Degree of alignment precision : 1mm
- Load weight : 60kg (User Order)
- Speed : 0.8m/s (User Order)
- Transported material : LCD TFT mask case and automatic transported material in the clean room
- Main use : LCD/OLED Mask Line
Semiconductor 200mm AGV
- Loading/Unloading : 6-axis robot
- Degree of alignment precision : ±1mm
- Load weight : 10kg (User Order)
- Speed : 1m/s (User Order)
- Transported material : 200mm Cassette, 300mm Foup
- Main use : 200mm, 300mm semiconductor wafer production line (Class 100)
Pharmaceutical vial AGV
- Loading/Unloading : Multi-stage sliding robot
- Degree of alignment precision : 1mm
- Load weight : 60kg (User Order)
- Speed : 1.3m/s (User Order)
- Transported material : Pharmaceutical vial transportation
- Main use : Vial manufacturing factory
